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Process Engineer III

Tokyo Electron LtdChaska, MN

$78,486 - $110,854 / year

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Overview

Schedule
Full-time
Education
Engineering (PE)
Career level
Senior-level
Remote
On-site
Compensation
$78,486-$110,854/year
Benefits
Paid Vacation

Job Description

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Job Description

Process Engineer III - Plasma Process & Hardware Development

Location: Chaska MN or Chelmsford MA

Position Summary

The Process Engineer III is an experienced technical contributor responsible for the development, characterization, and optimization of advanced plasma processes and plasma hardware. This role requires deep expertise in plasma physics, plasma-material interactions, plasma source design, and process development. The engineer will leverage both computational modeling and experimental methods to develop next-generation plasma technologies for semiconductor manufacturing, advanced materials processing, or related applications.

Working in a multidisciplinary environment, the Process Engineer III will collaborate closely with hardware, electrical, mechanical, and systems engineers to design, validate, and improve plasma systems while driving process performance, reliability, and manufacturability.

Key Responsibilities

  • Develop and optimize plasma processes to meet performance, quality, and manufacturability objectives.
  • Apply advanced knowledge of plasma physics, plasma chemistry, and plasma-material interactions to solve complex technical challenges.
  • Design, develop, and evaluate plasma hardware, including plasma sources, microwave and RF power delivery systems, gas delivery components, magnetic field configurations, and chamber hardware.
  • Perform plasma diagnostics and experimental characterization using techniques such as Langmuir probes, optical emission spectroscopy (OES), VI probes, mass spectrometry, FTIR or other diagnostic tools.
  • Utilize plasma simulation and modeling tools to predict plasma behavior, optimize reactor designs, and correlate simulation results with experimental data.
  • Design and execute statistically sound experiments (DOE), analyze process data, and develop engineering models to improve plasma performance.
  • Troubleshoot plasma process and hardware issues through systematic root cause analysis and corrective actions.
  • Collaborate with cross-functional teams including product engineering, systems engineering, manufacturing, and reliability engineering to transition new technologies into production.
  • Develop technical documentation, engineering reports, design specifications, and operating procedures.
  • Present technical findings to engineering leadership, customers, and cross-functional teams.
  • Mentor junior engineers and provide technical leadership on plasma-related projects.

Required Qualifications

  • Bachelor's degree in Physics, Electrical Engineering, Mechanical Engineering, Chemical Engineering, Materials Science, or a related technical field.

  • Minimum of 5 years of experience in plasma process development, plasma hardware development, or related engineering disciplines.

  • Strong fundamental understanding of:

  • Plasma physics

  • Plasma chemistry

  • Plasma-material interactions

  • RF and microwave plasma generation and power coupling

  • Gas-phase kinetics and transport phenomena

  • Demonstrated experience developing plasma hardware and reactor components.

  • Experience with plasma simulation tools (e.g., COMSOL Multiphysics, VSim, CFD-ACE+, ANSYS, or equivalent) and correlation of simulation results with experimental data.

  • Hands-on experience designing and conducting plasma experiments and interpreting diagnostic data.

  • Strong analytical, troubleshooting, and data analysis skills.

  • Experience using Design of Experiments (DOE) methodologies and statistical analysis.

  • Excellent written and verbal communication skills.

Preferred Qualifications

  • Master's or Ph.D. in Plasma Physics, Electrical Engineering, Mechanical Engineering, Materials Science, or a related field.
  • Experience in semiconductor equipment, vacuum systems, thin-film processing, etch, deposition, surface treatment, or advanced plasma applications.
  • Knowledge of RF matching networks, microwave plasma systems, pulsed plasma operation, and electromagnetic modeling.
  • Familiarity with finite element analysis (FEA), computational fluid dynamics (CFD), or particle-in-cell (PIC) plasma simulations.
  • Programming experience in Python, MATLAB, or similar scientific computing languages for data analysis and automation.
  • Experience transferring plasma technologies from research and development into manufacturing.

Core Competencies

  • Advanced plasma physics expertise
  • Plasma process development
  • Plasma hardware design and integration
  • Computational modeling and simulation
  • Experimental design and validation
  • Root cause analysis and problem solving
  • Cross-functional collaboration
  • Technical leadership and mentoring
  • Project execution and continuous improvement

Salary Ranges

$78,485.94 - $110,853.80

Individual pay is determined based on multiple factors, including but not limited to location, experience, skills, job-related knowledge, relevant education, certifications, and/or training. In addition to base salary, we offer (full time regular employees ) a comprehensive benefits package and for certain roles eligibility in our bonus plan and long-term incentives as applicable. The talent advisor can share more details about total compensation for the role in your location during the hiring process.

Diversity creates an innovative culture. TEL US is an Equal Employment Opportunity / Affirmative Action employer and all qualified applicants will receive consideration for employment without regard to race, color, religion, sex, age, national origin, protected veteran status, disability status, sexual orientation, gender identity or expression, marital status, genetic information, or any other characteristic protected by law.

Subsidiary

TEL Manufacturing and Engineering of America, Inc.

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FAQs About Process Engineer III Jobs at Tokyo Electron Ltd

What is the work location for this position at Tokyo Electron Ltd?
This job at Tokyo Electron Ltd is located in Chaska, MN, according to the details provided by the employer. Some roles may also include multiple work locations depending on the requirement.
What pay range can candidates expect for this role at Tokyo Electron Ltd?
Candidates can expect a pay range of $78,485.94 and $110,853.8 per year.
What employment applies to this position at Tokyo Electron Ltd?
Tokyo Electron Ltd lists this role as a Full-time position.
What experience level is required for this role at Tokyo Electron Ltd?
Tokyo Electron Ltd is looking for a candidate with "Senior-level" experience level.
What education level is required for this job?
The education requirement for this position is Engineering (PE). Candidates with relevant qualifications or equivalent experience may also be considered.
What benefits are offered by Tokyo Electron Ltd for this role?
Tokyo Electron Ltd offers Paid Vacation for this position. Actual benefits may vary depending on the employer's policies and employment terms.
What is the process to apply for this position at Tokyo Electron Ltd?
You can apply for this role at Tokyo Electron Ltd either through Sonara's automated application system, which helps you submit applications 10X faster with minimal effort, or by applying manually using the direct link on the job page.